Two-Photon Laser Lithography of Functional Microstructures of Integrated Photonics: Waveguides, Microcavities, and Prism Input/Output Adapters of Optical Radiation

The development and optimization of methods for creating functional elements micron sub-micron sizes photonic integrated circuits is one the main tasks nanophotonics. Two-photon laser lithography actively developing now to form three-dimensional structures with subwave resolution. Results this are reported it shown that use optimized schemes, spatial filtering beam used, introduction dyes into polymer lead formation optically homogeneous high-quality bulk microstructures characteristic features down 300 nm necessary properties. capabilities two-photon demonstrated by examples ring microcavities optical waveguides prism input/output adapters located above a substrate. Optical losses upon coupling 405-nm radiation waveguide using printed adapter was no more than 1.25 dB.